{"product_id":"716-011493-001-spacer-qtz-284-303mm-lam-research","title":"716-011493-001 \/ SPACER, QTZ, 284-303MM \/ LAM RESEARCH","description":"\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eManufacturer:\u003c\/strong\u003e LAM Research\u003cspan class=\"PDq2pG_selectionAnchor\"\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePart Number:\u003c\/strong\u003e 716-011493-001\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eType:\u003c\/strong\u003e Spacer\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaterial:\u003c\/strong\u003e Quartz (QTZ)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWafer Size Compatibility:\u003c\/strong\u003e 284–303 mm (300 mm tools)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eApplication:\u003c\/strong\u003e Plasma processing \/ etch chamber modules\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModule Type:\u003c\/strong\u003e P.R. (Process Reactor) module\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cbr\u003eThe \u003cstrong\u003e716-011493-001\u003c\/strong\u003e is a precision \u003cstrong\u003equartz spacer (QTZ)\u003c\/strong\u003e used in \u003cstrong\u003eLAM Research semiconductor processing systems\u003c\/strong\u003e, designed for wafer sizes in the \u003cstrong\u003e284 mm to 303 mm range (300 mm class)\u003c\/strong\u003e.\u003c\/p\u003e\n\u003cp\u003eThis component is typically installed within the \u003cstrong\u003eprocess module (P.R. module \/ plasma reactor)\u003c\/strong\u003e, where it serves as a \u003cstrong\u003emechanical and thermal spacing element\u003c\/strong\u003e to maintain correct alignment and spacing between critical chamber parts during wafer processing.\u003c\/p\u003e","brand":"83TECH PTE LTD","offers":[{"title":"Default Title","offer_id":44832778387549,"sku":null,"price":0.0,"currency_code":"SGD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0746\/5422\/0381\/files\/23-2.jpg?v=1785479554","url":"https:\/\/83techsg.com\/products\/716-011493-001-spacer-qtz-284-303mm-lam-research","provider":"83TECH PTE LTD","version":"1.0","type":"link"}