{"product_id":"tel-clean-track-mark-viii","title":"TEL Clean Track Mark VIII","description":"\u003cp\u003eOperational Status: In storage.\u003cbr\u003eWafer Size: 8\"\/200mm\u003cbr\u003eVintage: 1997\u003cbr\u003eDescription: Complete, Working Condition, with no missing parts. \u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003eMain Body Configuration\u003cbr\u003e\u003cbr\u003e-Standard configuration includes items listed below\u003cbr\u003e- (2) Coater module, including: Three (3) coat dispenses, 3 x TalonTech TP-12 pumps, max 1,000cP, Solvent Pre-wet, Programmable Topside Edge Bead Removal (TEBR), Back\u003cbr\u003e- Rinse, solvent bath, customer supplied resist\/solvent filters, programmable motor flange temperature control, programmable resist fluid temperature control, 10L local drain\u003cbr\u003e- Tanks, rear exhaust connections\u003cbr\u003e- (1) Developer module, including: Two H-nozzles, top and bottom D.I. Water rinse, customer supplied Develop\/D.I. water filters, programmable motor flange temperature control, programmable develop fluid temperature control, 10L local drain tank, rear\u003cbr\u003e- Exhaust connections\u003cbr\u003e- (3) Digital vacuum sensors interlocked (one on each Spin Unit Process module)\u003cbr\u003e- (1) Adhesion Plate (AD) thermal unit\u003cbr\u003e- (6) Hot Plate (HP) thermal unit\u003cbr\u003e- (5) Cool Plate (COL) thermal unit\u003cbr\u003e- (1) Triple robotic substrate transfer arm with Teflon centering blocks\u003cbr\u003e- (1) Carrier Station with four (4) cassette locations and vacuum free transfer arm\u003cbr\u003e- (1) System Environmental Enclosure with FFU’s\u003cbr\u003e- (1) Internal Rack (FTC), including: 2 Thermo-con circulation units, 1 SMC Thermo-con controller unit, 5 cooling power supplies\u003cbr\u003e- (1) Internal Resist\/Canisters\/HMDS bubbler-drain bottle storage: Three 1 gallon resist bottles, HMDS bubbler and drain containers, two 1-gallon canisters – one for solvent;\u003cbr\u003e- Two supplied for develop but QD’s to allow operation of one develop canister at a time\u003c\/p\u003e\n\u003cp\u003eInside System\u003c\/p\u003e\n\u003cp\u003e- (1) AC Power Distribution Transformer, 480v\/3 phase type\u003cbr\u003e- (1) Recipe Cascading and Parallel SW option configuration activation\u003cbr\u003e- (1) ARDiMuS, With SECS communication – with BU included\u003cbr\u003e- (1) SEMI S2-93 safety compliant\u003c\/p\u003e","brand":"83TECH PTE LTD","offers":[{"title":"Default Title","offer_id":44829384343645,"sku":null,"price":0.0,"currency_code":"SGD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0746\/5422\/0381\/files\/2.jpg?v=1785392624","url":"https:\/\/83techsg.com\/products\/tel-clean-track-mark-viii","provider":"83TECH PTE LTD","version":"1.0","type":"link"}