Spare Parts

TOKYO ELECTRON TEL 1D10-201588-12 UPPER ELECTRODE, P, (DRM2), 1Z048AA-58812

TOKYO ELECTRON TEL 1D10-201588-12 UPPER ELECTRODE, P, (DRM2), 1Z048AA-58812

ASYST 9700-3095-01 REV B

ASYST 9700-3095-01 REV B

MYKROLIS MDV018 THROTTLE GATE VALVE

MYKROLIS MDV018 THROTTLE GATE VALVE

Toroidal Orifice, WJ999 / 3.0 (11/32") 911701-001

Toroidal Orifice, WJ999 / 3.0 (11/32") 911701-001

MCG SERVO MOTOR 2232-MBG3957 W/ CGI GEARHEAD 023SPX0180-XX-23N08

MCG SERVO MOTOR 2232-MBG3957 W/ CGI GEARHEAD 023SPX0180-XX-23N08

MATTSON 303-13507-00, MOUNT, MOTOR, SHUTTLE LIFT

MATTSON 303-13507-00, MOUNT, MOTOR, SHUTTLE LIFT

0200-18093R Ceramic Nozzle (2.55L)

0200-18093R Ceramic Nozzle (2.55L)

NATS-A14 Altymid Clamping Ring (Aluminum, Anodised)

NATS-A14 Altymid Clamping Ring (Aluminum, Anodised)

15-161439-00-C Isolating Plate, Ceramic (ALD-GE-1007)

15-161439-00-C Isolating Plate, Ceramic (ALD-GE-1007)

716-018614-081 Focus Ring 21534651 Lam Research Corporation

716-018614-081 Focus Ring 21534651 Lam Research Corporation

Lam Research (LAM) 716-331157-013 DISK, INTERFEROMTER, TOP GAS

Lam Research (LAM) 716-331157-013 DISK, INTERFEROMTER, TOP GAS

VARIAN 0471619701 COLLIMATOR,04-716197-01

VARIAN 0471619701 COLLIMATOR,04-716197-01

Lam Research 716-011763-008 Wafer Clamp Edge 8" Edge Ring

Lam Research 716-011763-008 Wafer Clamp Edge 8" Edge Ring

Coors 1996000300 8.15" Triode Insulator Bushing Mattson 199-60003-00

Coors 1996000300 8.15" Triode Insulator Bushing Mattson 199-60003-00

Mattson Technology 199-60004-00 Triode Insulator

Mattson Technology 199-60004-00 Triode Insulator