Lam Research 716-011763-008 Wafer Clamp Edge 8" Edge Ring
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Lam Research 716-011763-008 Wafer Clamp Edge 8" Edge Ring
The Lam Research 716-011763-008 is an 8-inch wafer clamp edge ring designed for use in semiconductor plasma processing systems. It is installed around the wafer perimeter on the electrostatic chuck (ESC) or pedestal to provide mechanical support, edge protection, and process uniformity control.