716-011493-001 / SPACER, QTZ, 284-303MM / LAM RESEARCH

• Manufacturer: LAM Research
• Part Number: 716-011493-001
• Type: Spacer
• Material: Quartz (QTZ)
• Wafer Size Compatibility: 284–303 mm (300 mm tools)
• Application: Plasma processing / etch chamber modules
• Module Type: P.R. (Process Reactor) module

The 716-011493-001 is a precision quartz spacer (QTZ) used in LAM Research semiconductor processing systems, designed for wafer sizes in the 284 mm to 303 mm range (300 mm class).

This component is typically installed within the process module (P.R. module / plasma reactor), where it serves as a mechanical and thermal spacing element to maintain correct alignment and spacing between critical chamber parts during wafer processing.