716-011493-001 / SPACER, QTZ, 284-303MM / LAM RESEARCH
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716-011493-001 / SPACER, QTZ, 284-303MM / LAM RESEARCH
- Manufacturer: LAM Research
- Part Number: 716-011493-001
- Type: Spacer
- Material: Quartz (QTZ)
- Wafer Size Compatibility: 284–303 mm (300 mm tools)
- Application: Plasma processing / etch chamber modules
- Module Type: P.R. (Process Reactor) module
The 716-011493-001 is a precision quartz spacer (QTZ) used in LAM Research semiconductor processing systems, designed for wafer sizes in the 284 mm to 303 mm range (300 mm class).