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Ferrotec GSG High-Purity Quartz Pedestal Table, Tokyo Electron TEL P/N 2105-203012-12, Ferrotec ID H480111-01, Old P/N 2MSTEL-1810
Manufacturer / Supplier: Ferrotec GSG Corporation
Customer / Equipment OEM: Chartered Semiconductor / Tokyo Electron (TEL)
TEL Part Number: 2105-203012-12
Ferrotec GSG ID: H480111-01
Current Inventory P/N: SE-038339-N1
Old P/N: 2MSTEL-1810
Description: Quartz Pedestal Table
Material: High-purity quartz
Quantity: 1 pc
Lot ID: D07083809
The component is a large circular quartz plate/table with a raised peripheral structure and machined features, supplied in a protective plastic cleanroom-style package. Its quartz construction and precision-machined geometry are consistent with components used inside semiconductor process chambers, where high purity, thermal resistance and low contamination are important.