Lam Research (LAM) 716-331157-013 DISK, INTERFEROMTER, TOP GAS
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Lam Research (LAM) 716-331157-013 DISK, INTERFEROMTER, TOP GAS
The Lam Research 716-331157-013 is a top gas interferometer disk used in semiconductor plasma processing systems, particularly within etch chambers (e.g., Lam 9400 series platforms).