Mattson Technology 199-60001-00 Grid, Triode

Manufacturer: Mattson Technology, Inc.

Part Number: 199-60001-00

Revision: 06

Description: GRID, TRIODE

Vendor: Mattson Technology Inc.

Inventory P/N: SE-014808-N1

The Mattson Technology 199-60001-00 Grid, Triode is an OEM replacement electrode assembly designed for Mattson semiconductor plasma processing equipment. Installed within the process chamber, the triode grid regulates plasma characteristics and contributes to stable plasma generation, uniform ion distribution, and repeatable wafer processing performance. Precision manufactured for high-vacuum semiconductor environments, the component is intended for use in plasma strip, dry etch, and related semiconductor manufacturing applications. The part is supplied in cleanroom packaging and is suitable as a replacement spare for compatible Mattson Technology systems.