MYKROLIS MDV018 THROTTLE GATE VALVE

The MYKROLIS MDV018 Throttle Gate Valve is a precision vacuum control valve used in semiconductor processing equipment to regulate chamber pressure and exhaust flow. It is typically installed between the process chamber and vacuum pump, where it modulates gas flow to maintain stable process conditions.

This type of throttle valve operates by adjusting a gate or flapper position, allowing fine control of conductance and pressure inside the chamber. Accurate pressure regulation is critical in processes such as etch, CVD, and PVD, where even small variations can impact film quality and yield.

Throttle valves are widely used in semiconductor tools because they enable smooth, linear pressure control by modulating gas removal from the system, ensuring consistent and repeatable processing conditions.

The MDV018 model is designed for high vacuum environments, offering reliable sealing, low leak rates, and compatibility with corrosive process gases.