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TEL Tokyo Electron CU300L5Z2B (TELS) Thyristor Circuit Board
The Tokyo Electron (TEL) CU300L5Z2B Thyristor Circuit Board is a high-power SCR (silicon-controlled rectifier) power control assembly designed for use in Tokyo Electron semiconductor manufacturing equipment. This module regulates and switches high-current AC power supplied to process chamber heaters and other high-power loads, providing precise temperature control and stable power delivery during semiconductor wafer processing. The assembly incorporates multiple industrial-grade thyristor modules mounted on a heavy-duty aluminum heatsink with integrated cooling fans, high-current copper bus bars, terminal blocks, and control wiring to ensure reliable operation in demanding cleanroom manufacturing environments.