Tokyo Electron (TEL) Water Cooling Flange, P/N 111020531411

The Tokyo Electron (TEL) Water Cooling Flange, Part Number 111020531411, is an OEM precision-machined cooling flange designed for semiconductor processing equipment. Constructed from high-grade stainless steel, the flange features integrated water cooling channels with dual tube fittings to provide efficient thermal management of critical chamber components during high-temperature plasma and vacuum processing. The precision-machined sealing surfaces and mounting holes ensure reliable installation, vacuum integrity, and consistent cooling performance. Manufactured in Japan by Tokyo Electron Limited, this component is intended for use in compatible TEL semiconductor process systems and serves as a replacement spare for preventive maintenance or equipment refurbishment. Supplied as an OEM semiconductor spare, it is suitable for applications requiring high reliability, low contamination, and stable thermal control in vacuum processing environments.