TYLAN GENERAL AdapTorr AC-2 Throttle Valve Controller

The TYLAN GENERAL AdapTorr AC-2 is a rack-mount electronic throttle valve controller designed to regulate vacuum chamber pressure in semiconductor manufacturing equipment. It interfaces with a motorized throttle valve and pressure transducer to automatically maintain a programmed process pressure by continuously adjusting the valve position. The controller is widely used in vacuum process applications such as plasma etching, PECVD, LPCVD, sputtering, and other semiconductor fabrication systems where stable chamber pressure is essential for process repeatability and film uniformity. The AC-2 has been used in equipment from manufacturers including Lam Research, Applied Materials, and other OEM vacuum processing systems. It operates from 115–208 VAC and features a front-panel digital display with manual and automatic control functions. The model has since been discontinued but remains common on legacy semiconductor production tools.