Axcelis Technologies 17126830 Chamber Shell Plate

• OEM: Axcelis Technologies
• Component Number: 17126830
• Internal P/N: 2MSEAT-2136
• Description on Material Ticket: SHELL
• Manufacturer: Showa
• Year: 2000

The Axcelis Technologies 17126830 Chamber Shell Plate is an OEM precision-machined replacement component for semiconductor ion implantation equipment. Identified as a Shell on the manufacturer's material identification label, this circular plate features a large central process opening and precision mounting holes for accurate installation within the process chamber. Manufactured from plasma-compatible aluminum with a protective surface treatment, the shell plate shields critical chamber components from sputtering and contamination while helping maintain vacuum integrity and process stability. Supplied in cleanroom packaging, this component is suitable as a replacement spare for compatible Axcelis ion implantation systems.