Tokyo Electron (TEL) 1D10-201082-12 Upper Electrode 10
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Tokyo Electron (TEL) 1D10-201082-12 Upper Electrode 10
- Manufacturer: Tokyo Electron Limited (TEL)
- Part Number: 1D10-201082-12
- Description: ELECTRODE UPPER 10
- Vendor: HEMES-EPITEK CORPORATION PTE LTD
- Old P/N: 2MSTEL-7017
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Manufacturing Date: 1997-12-26
The Tokyo Electron Limited 1D10-201082-12 Upper Electrode 10 is a precision-machined OEM showerhead electrode designed for semiconductor plasma processing equipment. Installed in the upper portion of the process chamber, the electrode distributes process gases uniformly while serving as the RF-powered electrode during plasma generation. Manufactured to tight dimensional tolerances, the component provides excellent plasma uniformity, stable process performance, and low particle generation for critical semiconductor manufacturing applications including PECVD, plasma etching, and dry cleaning processes. The assembly is supplied in original cleanroom packaging with a protective surface film to preserve the precision-machined sealing and process surfaces.