Tokyo Electron (TEL) 1D10-301638-13 Focus Ring

Manufacturer: Tokyo Electron Limited (TEL)

Part Number: 1D10-301638-13

Description: RING, FOCUS

Vendor: Hermes-Epitek Corporation Pte Ltd

The Tokyo Electron 1D10-301638-13 Focus Ring is an OEM semiconductor chamber component designed for use in TEL plasma etch systems. Installed around the wafer on the electrostatic chuck, the focus ring improves plasma confinement, enhances edge uniformity, and protects the chuck from plasma erosion during semiconductor manufacturing. Precision manufactured from a plasma-resistant material, the component is intended for oxide, dielectric, and other dry etch applications requiring excellent dimensional stability and low particle generation. Supplied in cleanroom packaging, this OEM replacement part is suitable for preventive maintenance and refurbishment of compatible Tokyo Electron plasma processing equipment.