Toshiba Ceramics TPSS High Purity Silicon Carbide CU-BOAT-E.V Wafer Boat

The Toshiba Ceramics CU-BOAT-E.V is a high-purity silicon carbide (TPSS) wafer boat manufactured for semiconductor batch processing equipment. Designed for use in diffusion, oxidation, LPCVD, and other high-temperature furnace applications, the boat securely supports silicon wafers while maintaining excellent dimensional stability and minimizing particle contamination. Constructed from Toshiba's proprietary TPSS silicon carbide material, it offers outstanding thermal shock resistance, chemical resistance, and long service life in demanding semiconductor manufacturing environments. The component remains sealed in its original cleanroom packaging, making it suitable as a replacement spare or OEM process part for compatible furnace systems.