Spare Parts - All

Skip to results list
69 items

Filter

  • SMC EM500-020T Filter Element, 20 µm, Stainless Steel

    SMC EM500-020T Filter Element, 20 µm, Stainless Steel

    SMC EM500-020T Filter Element, 20 µm, Stainless Steel
    $0.00
  • Mattson Technology 062-000002-00 Rev. 03 STANDOFF-HEATER

    Mattson Technology 062-000002-00 Rev. 03 STANDOFF-HEATER

    Mattson Technology 062-000002-00 Rev. 03 STANDOFF-HEATER
    $0.00
  • CZA0810 2B Viton Drain Valve

    CZA0810 2B Viton Drain Valve

    CZA0810 2B Viton Drain Valve
    $0.00
  • Mattson Technology SE-037742-N1 Process Chamber Component (Old P/N: 2MSNOV-0014)

    Mattson Technology SE-037742-N1 Process Chamber Component (Old P/N: 2MSNOV-0014)

    Mattson Technology SE-037742-N1 Process Chamber Component (Old P/N: 2MSNOV-0014)
    $0.00
  • DISCO Corporation Wheel IF, P/N 303200035419

    DISCO Corporation Wheel IF, P/N 303200035419

    DISCO Corporation Wheel IF, P/N 303200035419
    $0.00
  • Tokyo Electron (TEL) Water Cooling Flange, P/N 111020531411

    Tokyo Electron (TEL) Water Cooling Flange, P/N 111020531411

    Tokyo Electron (TEL) Water Cooling Flange, P/N 111020531411
    $0.00
  • Axcelis Technologies 17126830 Chamber Shell Plate

    Axcelis Technologies 17126830 Chamber Shell Plate

    Axcelis Technologies 17126830 Chamber Shell Plate
    $0.00
  • Steag RTP Systems Back Radiant Silicon Ring for High Temperature Processes – 200 mm

    Steag RTP Systems Back Radiant Silicon Ring for High Temperature Processes – 200 mm

    Steag RTP Systems Back Radiant Silicon Ring for High Temperature Processes – 200 mm
    $0.00
  • Tokyo Electron (TEL) 1D10-301638-13 Focus Ring

    Tokyo Electron (TEL) 1D10-301638-13 Focus Ring

    Tokyo Electron (TEL) 1D10-301638-13 Focus Ring
    $0.00
  • Mattson Technology 199-60001-00 Grid, Triode

    Mattson Technology 199-60001-00 Grid, Triode

    Mattson Technology 199-60001-00 Grid, Triode
    $0.00
  • Tokyo Electron (TEL) 1D10-201082-12 Upper Electrode 10

    Tokyo Electron (TEL) 1D10-201082-12 Upper Electrode 10

    Tokyo Electron (TEL) 1D10-201082-12 Upper Electrode 10
    $0.00
  • Heraeus Shin-Etsu Quartz Singapore 1105-100935-12 Quartz Wafer Boat / Furnace Carrier Assembly

    Heraeus Shin-Etsu Quartz Singapore 1105-100935-12 Quartz Wafer Boat / Furnace Carrier Assembly

    Heraeus Shin-Etsu Quartz Singapore 1105-100935-12 Quartz Wafer Boat / Furnace Carrier Assembly
    $0.00
  • Toshiba Ceramics TPSS High Purity Silicon Carbide CU-BOAT-E.V Wafer Boat

    Toshiba Ceramics TPSS High Purity Silicon Carbide CU-BOAT-E.V Wafer Boat

    Toshiba Ceramics TPSS High Purity Silicon Carbide CU-BOAT-E.V Wafer Boat
    $0.00
  • Seiko Seiki STP-300H Turbo Pump

    Seiko Seiki STP-300H Turbo Pump

    Seiko Seiki STP-300H Turbo Pump
    $0.00
  • STP-300 / TURBOMOLECULAR PUMP CONTROL UNIT, SCU-300 / SEIKO SEIKI

    STP-300 / TURBOMOLECULAR PUMP CONTROL UNIT, SCU-300 / SEIKO SEIKI

    STP-300 / TURBOMOLECULAR PUMP CONTROL UNIT, SCU-300 / SEIKO SEIKI
    $0.00
  • TYLAN GENERAL AdapTorr AC-2 Throttle Valve Controller

    TYLAN GENERAL AdapTorr AC-2 Throttle Valve Controller

    TYLAN GENERAL AdapTorr AC-2 Throttle Valve Controller
    $0.00
  • Applied Materials (AMAT) 0021-10223 LINER,CHAMBER,CLAMP LID

    Applied Materials (AMAT) 0021-10223 LINER,CHAMBER,CLAMP LID

    Applied Materials (AMAT) 0021-10223 LINER,CHAMBER,CLAMP LID
    $0.00
  • 2ERTG-0003 / 2ERTG-002E, JAPAN ENERGY CORPORATION

    2ERTG-0003 / 2ERTG-002E, JAPAN ENERGY CORPORATION

    2ERTG-0003 / 2ERTG-002E, JAPAN ENERGY CORPORATION
    $0.00
  • High-purity Silicon Carbide (SiC) Ceramic, Toshiba Ceramics Co., Ltd.

    High-purity Silicon Carbide (SiC) Ceramic, Toshiba Ceramics Co., Ltd.

    High-purity Silicon Carbide (SiC) Ceramic, Toshiba Ceramics Co., Ltd.
    $0.00
  • MANIFOLD COVER 1105-200660-13

    MANIFOLD COVER 1105-200660-13

    MANIFOLD COVER 1105-200660-13
    $0.00
  • ALD-GE-1021A PROCESS CHAMBER, WELDMENT, IRIDIA-DL, 05-3606

    ALD-GE-1021A PROCESS CHAMBER, WELDMENT, IRIDIA-DL, 05-3606

    ALD-GE-1021A PROCESS CHAMBER, WELDMENT, IRIDIA-DL, 05-3606
    $0.00
  • TEL Tokyo Electron CU300L5Z2B (TELS) Thyristor Circuit Board

    TEL Tokyo Electron CU300L5Z2B (TELS) Thyristor Circuit Board

    TEL Tokyo Electron CU300L5Z2B (TELS) Thyristor Circuit Board
    $0.00
  • QUARTZ PEDESTAL 1105-300886-13

    QUARTZ PEDESTAL 1105-300886-13

    QUARTZ PEDESTAL 1105-300886-13
    $0.00
  • Mattson 58900085 Quartz Plate 8-Zone Heater Holder (Liner, Ver.2)

    Mattson 58900085 Quartz Plate 8-Zone Heater Holder (Liner, Ver.2)

    Mattson 58900085 Quartz Plate 8-Zone Heater Holder (Liner, Ver.2)
    $0.00